Berichte aus Forschung und Entwicklung IST, Band 42
Sanjeev Kumar Gurram
Hrsg.: Fraunhofer IST
2017, 200 S., num., mostly col. illus. and tab., Softcover
In this work Atomic Layer deposition of niobium and titanium doped ZnO based Transparent Conductive Oxide (TCO) coatings were developed. The fundamentals required for the deposition and doping of ZnO TCOs are discussed. The various opto-electronic properties of the niobium and titanium doped ZnO films were determined and compared. A model was proposed to explain the various changes in the opto-electronic properties of these films.